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An expert system for a semiconductor manufacturing environment |
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| Authors: | Frank Szarka Rafael Moras |
| Institution: | 1. Eindhoven University of Technology, Faculty of Technology Management , PAV D-13, PO Box 513, NL-5600 MB Eindhoven, The Netherlands E-mail: M.H.Jansen-Vullers@tm.tue.nl;2. University of Groningen , PO Box 800, 9700 AB Groningen, The Netherlands E-mail: J.C.Wortmann@bdk.rug.nl;3. Wageningen University , Dreijenplein 2, 6703 HB Wageningen, The Netherlands E-mail: adrie.beulens@wur.nl |
| Abstract: | We developed an expert system to analyse and suggest solutions to problems commonly encountered in the production of integrated circuits. We wrote a PC-based program to implement the expert system. Our goal is to enable interested readers to relate some of the accomplishments realized by a high tech manufacturing company to their own production, manufacturing or maintenance environment. We discuss the difficulties encountered when implementing an expert system as well as the great benefits derived from its use. |
| Keywords: | Expert Systems Statistical Process Control High Tech Manufacturing |