| 氮化硅薄膜热性能测试研究 |
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| 引用本文： | 蒲娟,吴志明,蒋亚东,熊昊,张良昌.氮化硅薄膜热性能测试研究[J].电子科技大学学报(社会科学版),2009(2). |
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| 作者姓名： | 蒲娟 吴志明 蒋亚东 熊昊 张良昌 |
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| 作者单位： | 电子科技大学光电信息学院; |
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| 基金项目： | 国家杰出青年基金(60425101);;教育部新世纪优秀人才计划(NCET-04-0896) |
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| 摘 要： | 提出了一种可以测试氮化硅薄膜热导、热容的方法。该方法采用微机械加工技术制作成悬空结构,利用Pt薄膜来做加热与测温电阻。设计了合理的测试方案来减小测试过程中Pt薄膜附加热导、热容带来的影响。用Matlab模拟了结构的热响应特性。在Pt薄膜中通入直流电流后,桥面温度逐渐升高,最终达到稳定,在相同的电流输入下,微桥的热容、热导越大,桥面的温升越小。讨论了无效加热电阻和微结构加工工艺对测试精度的影响,并给出了提高测试精确度的方法。
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| 关 键 词： | Pt薄膜 氮化硅薄膜 热导 热容 |
Measurement of Thermal Performance of Silicon Nitride Thin Films |
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| PU Juan,WU Zhi-ming,JIANG Ya-dong,XIONG Hao, ZHANG Liang-chang.Measurement of Thermal Performance of Silicon Nitride Thin Films[J].Journal of University of Electronic Science and Technology of China(Social Sciences Edition),2009(2). |
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| Authors: | PU Juan WU Zhi-ming JIANG Ya-dong XIONG Hao ZHANG Liang-chang |
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| Institution: | School of Optoelectronic Information;University of Electronic Science and Technology of China Chengdu 610054 |
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| Abstract: | This paper presents a new approach for measuring the thermal conductance and thermal mass of silicon nitride film with suspended structure fabricated by micromachining technique. In the structure, the Pt thin film is used as both heater and temperature detector based on its temperature resistance characterization. A reasonable scheme has been designed to reduce the additional thermal conductance and thermal mass introduced by Pt thin film. During the test, when DC current is input in the Pt thin film, the m... |
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| Keywords: | Pt thin film silicon nitride thin film thermal conductance thermal mass |
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