强束流Zr离子注入H13钢改善其耐磨性研究

采用由金属蒸汽真空弧离子源引出的强束流Ｚｒ，Ｚｒ＋Ｃ离子对Ｈ１３钢进行了离子束表面处理，借助划痕仪和摩擦试验机分别测量了经表面处理的Ｈ１３钢的耐磨性和摩擦系数。研究结果表明：经Ｚｒ，Ｚｒ＋Ｃ离子束处理的Ｈ１３钢的耐磨性有所提高，摩擦系数明显降低，采用卢瑟福背散射谱（ＲＢＳ）ｘ射线衍射分析了注入层的成分，结构及影响其耐磨性的因素。

A Study of High Flux,Hith Dose Zr aud Zr+C IOn Implantation into H13 Steel

This paper reports an experiment in which high Zr+C ion beams extracted from a MEVVA ion source were imptanted into H13 Steel. Wear experiment results showed that the wear rate of the implanted sam- ples had dropped obviously. Zr and Zr+C ion beam treatment of H13 steel samples was found to reduce the fric- tion coefficient of H13 steel. Rutherford back scattering spectrum (RBS) was used to measure the surface compe sition after Zr and Zr+C implantation. Observation of the phase induced by Zr.C implantation was carried out by x-ray diffraction analysis(XRD). The wear mechanisms of the implanted layer are dicussed,based on the results of the experiments.