| 真空镀膜机的原理及维护 |
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| 引用本文： | 郭凯敏.真空镀膜机的原理及维护[J].阴山学刊,2007,21(4):44-46. |
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| 作者姓名： | 郭凯敏 |
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| 作者单位： | 包头师范学院物理系 内蒙古包头014030 |
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| 摘 要： | 为了教师和学生们能够更加顺利地完成真空镀膜实验并且维护好实验设备,本文主要通过真空镀膜原理及构造的角度,论述了真空镀膜机的具体维护。
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| 关 键 词： | 真空度 镀膜 |
| 文章编号： | 1004-1869(2007)04-0044-03 |
| 修稿时间： | 2006年12月14 |
Principle and Maintenance of Vacuum Coating Machine |
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| GUO Kai-min.Principle and Maintenance of Vacuum Coating Machine[J].Yin Shan Academic Journal,2007,21(4):44-46. |
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| Authors: | GUO Kai-min |
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| Abstract: | The article discusses the specific maintenance of vacuum coating machine from the respects of its structure and principle, by which teachers and students can maintain the equipment nicely while they are doing the experiment. |
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| Keywords: | vacuum degree vacuum deposition |
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