微纳米技术在工业装备中的应用研究进展

微型化是传统的化工、材料、能源、制药等行业重要的发展方向之一。对日益发展的微纳米工业装备，从微米和纳米技术两个层面进行分析。阐述了各种微纳米装备的研究现状、必要性、工艺性能和设备特点。从制造、集成、建模和模拟等方面，简要论述了纳米技术在未来发展中面临的挑战。

Application Development of the Micro- and Nano- technology in Industrial Equipment

The miniaturation is one of the important developing direction in the field of traditional chemical engineering, materials, energy and pharmaceutical. The micro-and nano-industrial equipment was analyzed from the view of micro- and nanometer technology. The developing trend, necessity, process properties and structure characteristics of various micro- and nano-equipment were discussed. The challenges in the future development of the nanotechnology were pointed out in terms of manufacture, integration, modeling and simulation.