压电式微驱动器的应用研究

在分析常用微驱动器的基础上，设计了一种压电式微驱动器，采用柔性铰链机构实现无机械摩擦、无间隙的高灵敏度微驱动，利用柔性铰链杠杆放大原理增加了叠层式压电陶瓷位移输出．满足了在激光测量系统中作为移相器的工作要求．文章对柔性铰链机构进行了理论分析，建立了数学模型，采用有限元分析方法优化了机构的结构参数．

Applications of piezoelectric micro driving mechanism

Based on analysis of micro driving, one piezoelectric micro driving mechanism is designed. Flexure hinge is used to implement non-mechanism friction as well as high sensitivity of micro driving. In accordance with the principle of leverage amplification, the flexure hinge amplifies the output displacement of stacking piezoelectric ceramic and it meets the need of working for phase shifter in laser testing system. The theretical analysis for flexure hinge is presented as well as its math modeling. Finite element analysis is used to optimize the main parameters of mechanism.