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真空微电子微三极管特性的计算机模拟
引用本文:杨中海,周勇,杨存宇.真空微电子微三极管特性的计算机模拟[J].电子科技大学学报(社会科学版),1996(3).
作者姓名:杨中海  周勇  杨存宇
作者单位:电子科技大学高能电子所
摘    要:用计算机模拟方法研究了真空微电子场致发射微三极管的特性,建立了数理模型。用差分方法求解泊松方程,以福勒──诺德海姆理论处理场致发射特性。细致处理了阴极表面电场,考虑了空间电荷效应的影响,并对模拟结果进行了分析讨论。

关 键 词:真空微电子学  场致发射阵列阴极  计算机模拟  泊松方程  福勒—诺德海姆理论

Computer Simulation of Characteristics of Microtriodes on Vacuum Microelectronics
Yang Zhonghai,Zhou Yong,Yang Cunyu.Computer Simulation of Characteristics of Microtriodes on Vacuum Microelectronics[J].Journal of University of Electronic Science and Technology of China(Social Sciences Edition),1996(3).
Authors:Yang Zhonghai  Zhou Yong  Yang Cunyu
Institution:Inst of High Energy Electronics. UEST of China Chengdu 610054
Abstract:By means of the computer simulation, the characteristics of field emission microtriodes are investigated in this paper. The finite method is used to solve the Poisson equation. Taking consideration of the space-charge effects, current y is obtained form Fowler-Nordheim equation, and the field at the cathode surface is calculated. The computed results show that the emitted current and the field enhancement depend upon geometrical factors,such as tip sharpness, tip height,significantly.
Keywords:vacuum microelectronics  field emitter array cathode  computer simulation  Poisson equation  Fowler-Nordheim fomalism  
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