| 多功能微波等离子体应用基础研究设备 |
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| 引用本文： | 谢扩军,季天仁,刘盛纲. 多功能微波等离子体应用基础研究设备[J]. 电子科技大学学报(社会科学版), 1996, 0(4) |
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| 作者姓名： | 谢扩军 季天仁 刘盛纲 |
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| 作者单位： | 成都电子科技大学高能电子所 |
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| 摘 要： | 介绍自行研制的多功能、多用途、计算机控制的大型微波等离子体应用与诊断设备，该设备包括一台高稳定１．５ｋＷ／２４５０ＭＨｚ微波源，微波传输与微波耦合系统，ＥＣＲ微波反应腔，大容积等离子体反应腔，真空获得系统，八路气体供给与控制系统，八探头等离子体诊断系统（包括径向和轴向朗缪探针，法拉第筒，能量分析器和等离子体鞘层探测器），多通道瞬态数据采集系统和计算机总控制系统，能较好满足微波等离子体基础研究和应用研究的多种要求和需要。
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| 关 键 词： | 电子回旋共振，微波等离子体，应用，诊断，设备 |
A New Multifunctional Equipment for Microwave ECR Plasma Applications and Diagnosis |
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| Xie Kuojun,Ji Tianren,Liu Shenggang. A New Multifunctional Equipment for Microwave ECR Plasma Applications and Diagnosis[J]. Journal of University of Electronic Science and Technology of China(Social Sciences Edition), 1996, 0(4) |
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| Authors: | Xie Kuojun Ji Tianren Liu Shenggang |
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| Abstract: | A new multifunctional large equipment for microwave ECR plasma applications and diagnosis is designed and developed by the authors themselves.The equipment consistS of a 1.5 kW/2 450 MHz high stability microwave power source,microwave transmission and coupling system, ECR microwave reactor,large volume Plasma reactor,vacuum syStem,gns distribution and flow controller, plasma diagnosis system(include radial and axial Langmuir probe, Faraday roll,energy analyser and Plasma sheath probe),multichannel transient recorder,which can satisfy the needs of the study for microwave plasma. |
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| Keywords: | electron cyclotron resonance microwave plasma application diagnosis equipments |
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