| 一种提取多导体互连电磁参数的有效方法 |
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| 引用本文： | 朱汉清,吴正德.一种提取多导体互连电磁参数的有效方法[J].电子科技大学学报(社会科学版),2002(4). |
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| 作者姓名： | 朱汉清 吴正德 |
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| 作者单位： | 电子科技大学电子工程学院 成都610054
(朱汉清)，电子科技大学电子工程学院 成都610054(吴正德) |
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| 基金项目： | 江苏省教育科研基金资助项目，编号:99KJD140005 |
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| 摘 要： | 利用区域分解法,将直线法和有限差分法相结合,计算了多层介质多导体互连的电容和电感矩阵。通过在纯介质区域使用直线法,导体所在区域使用有限差分法分别进行求解,充分发挥其各自的优越性。数值结果表明该计算方法有效,且计算时间与介质层的厚度无关。
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| 关 键 词： | 互连 参数提取 区域分解法 直线法 有限差分法 |
An Effective Method for Parameter Extraction of Multilayered Multiconductor Interconnections |
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| Zhu Hanqing,Wu Zhengde.An Effective Method for Parameter Extraction of Multilayered Multiconductor Interconnections[J].Journal of University of Electronic Science and Technology of China(Social Sciences Edition),2002(4). |
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| Authors: | Zhu Hanqing Wu Zhengde |
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| Abstract: | Through domain decomposition method, the method of lines combined with the finite-difference method is used to calculate the capacitance and inductance matrices of the multilayered multiconductor interconnections. The subregion with pure dielectric layers is analyzed by method of lines, while the subregion with conductors is analyzed by finite-difference method to take advantage fully the superiorities of these two methods. Numerical results show that the method in this paper is efficient, and the computing time is unrelated to the thickness of the pure dielectric layers. |
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| Keywords: | interconnections parameter extraction domain decomposition method method of lines finite-difference method |
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