| 电子回旋共振放电的理论计算机模拟进展 |
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| 引用本文： | 杨中海,金晓林. 电子回旋共振放电的理论计算机模拟进展[J]. 电子科技大学学报(社会科学版), 2006, 0(Z1) |
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| 作者姓名： | 杨中海 金晓林 |
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| 作者单位： | 电子科技大学物理电子学院 成都610054 |
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| 摘 要： | 电子回旋共振(ECR)等离子体因具有低气压、高密度、高电离度等优点而被广泛地应用于微电子工业中。ECR放电及其生成等离子体的理论、计算机模拟的研究主要集中于3种模型:粒子模型、流体模型、混合模型。该文对上述3种模型进行了综述、总结和对比,并对今后的研究前景进行了展望．特别指出模拟ECR放电电离过程的研究意义以及粒子模型中的粒子模拟与蒙特卡罗相结合(PIC/MCC)方法在模拟ECR放电及ECR等离子体方面的技术优势．
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| 关 键 词： | 电子回旋共振放电 电子回旋共振等离子体 粒子模拟 蒙特卡罗 粒子模拟与蒙特卡罗相结合 |
Theoretical and Computer Simulation of the ECR Discharge |
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| YANG Zhong-hai JIN Xiao-lin. Theoretical and Computer Simulation of the ECR Discharge[J]. Journal of University of Electronic Science and Technology of China(Social Sciences Edition), 2006, 0(Z1) |
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| Authors: | YANG Zhong-hai JIN Xiao-lin |
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| Abstract: | In recent years,the Electron Cyclotron Resonance(ECR)plasma have been extensively used in microelectronics industry because of their high density and ionization degree with low gas pressure.Particle,fluid, and hybrid models are focused on the theoretical and computer simulation of the ECR discharge and ECR plasma. In this paper,these three models are reviewed,summarized and contrasted respectively.The future research and development are viewed.It is important to study the ionization of the ECR microwave discharge.And the particle- in-cell plus Monte Carlo collision method in particle model is preponderant in the simulation of the ECR discharge and ECR plasma. |
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| Keywords: | electron cyclotron resonance discharge electron cyclotron resonance plasmas particle-in-cell Monte Carlo particle-in-cell/Monte Carlo collision |
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