| 氧化工艺在真空电弧沉积TiN薄膜中的应用--专业课程与课题相结合的实践 |
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| 引用本文： | 梁仕昌,曾鹏.氧化工艺在真空电弧沉积TiN薄膜中的应用--专业课程与课题相结合的实践[J].广东工业大学学报(社会科学版),2003,3(Z1):188-189. |
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| 作者姓名： | 梁仕昌 曾鹏 |
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| 作者单位： | 广东工业大学材料与能源学院,广东,广州,510643 |
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| 摘 要： | 文章通过氧化工艺对真空电弧沉积TiN薄膜组织与性能的影响这一课题研究,指出在毕业论文的工作中,将专业知识运用到实际课题的研究中,有利于提高学生的综合素质.
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| 关 键 词： | 专业课程 研究课题 真空电弧沉积 TiN薄膜 氧化工艺 |
| 修稿时间： | 2003年5月10日 |
Application of Oxidation Processing in TiN films Deposited by Vacuum Arc--A Practice of Combining Professional Courses with Science Program |
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| LIANG Shi-chang,ZENG Peng.Application of Oxidation Processing in TiN films Deposited by Vacuum Arc--A Practice of Combining Professional Courses with Science Program[J].Journal of Guangdong University of Technology(Social Sciences Edition),2003,3(Z1):188-189. |
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| Authors: | LIANG Shi-chang ZENG Peng |
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| Abstract: | This paper indicates that applying the professional knowledge to real research programs is propitious to improve students' comprehensive qualities during undergraduate thesis working through studying the influence of oxidation processing on microstructure and properties of TiN films deposited by vacuum. |
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| Keywords: | professional courses research programs vacuum arc deposition TiN film oxidation processing |
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