MEMS器件平板运动空气阻尼研究

针对微电子机械系统中平行板间的气膜阻尼问题,通过将平板沿垂直方向的位移运动方程展开为傅里叶级数,得到了微平面机构所受的空气阻尼力和阻尼系数的解析公式。结果表明,空气阻尼系数近似与两平板间气隙厚度的三次方成反比。通过对微加速度开关质量块工作时所受的空气阻尼进行仿真分析,得出该开关的阻尼系数在工作过程中为变阻尼的结论,并分析了空气阻尼系数对于开关性能的影响。

Study on the Air Damp of the Plate Movement in the MEMS Devices

The gas damp of the two translational moving parallel flats in Micro Electro-Mechanical System (MEMS) devices is analyzed. The analytical formulae of the gas damp force and damp coefficient of the parallel flats in the MEMS devices are derived by expanding the vertical motion equations of the flat in Fourier series. The result shows that the gas damp coefficient of the translational moving parallel flats is close to be inversely proportional to the third power of the gas film thickness. The gas damp in a micro acceleration switch is simulated. The results show that the gas damp changes according to the switch working state. The effect of the gas damp coefficient upon the switch performance is also studied.