| TMAH在压力传感器制作中的应用 |
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| 引用本文： | 刘洪,姚素英,曲宏伟,张生才,张维新,毛赣如. TMAH在压力传感器制作中的应用[J]. 电子科技大学学报(社会科学版), 2000, 0(6) |
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| 作者姓名： | 刘洪 姚素英 曲宏伟 张生才 张维新 毛赣如 |
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| 作者单位： | 天津大学电子信息工程学院!天津300072 |
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| 基金项目： | 国家自然科学基金!69876027 |
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| 摘 要： | 介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性,论述了在单晶硅和多晶硅高温压力传感器的制作过程中,TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。通过大量的实验得到了较为理想的腐蚀条件,取得了较好的腐蚀结果。
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| 关 键 词： | 四甲基氢氧化铵 终止腐蚀 高温压力传感器 各向异性腐蚀 硅杯 |
Application of TMAH Solutions in Manufacturing of Pressure Sensor |
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| Liu Hong,Yao Suying,Qu Hongwei,Zhang Shengcai,Zhang Weixin,Mao Ganru. Application of TMAH Solutions in Manufacturing of Pressure Sensor[J]. Journal of University of Electronic Science and Technology of China(Social Sciences Edition), 2000, 0(6) |
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| Authors: | Liu Hong Yao Suying Qu Hongwei Zhang Shengcai Zhang Weixin Mao Ganru |
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| Abstract: | In this paper, etching characteristics of TMAH solutions is introduced. Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed. Satisying process condition and experimental results are obtained through experiments. |
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| Keywords: | TMAH etch-stop high-temperature pressure sensor anisotropic etching silicon cup |
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