| 折射型微透镜列阵制作的一种新途径 |
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| 引用本文： | 李学民,卢国纬,周礼书. 折射型微透镜列阵制作的一种新途径[J]. 电子科技大学学报(社会科学版), 2000, 0(3) |
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| 作者姓名： | 李学民 卢国纬 周礼书 |
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| 作者单位： | 电子科技大学应用物理所!成都610054(李学民，卢国纬)，中国科学院光电研究所!成都610041(周礼书) |
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| 摘 要： | 介绍了一种制作折射型微透镜列阵的新方法，其主要思想参考了灰阶掩模法。所用掩模板用激光直写制作，通过一次曝光即可在光刻胶上形成折射型微透镜的轮廓，并给出了微透镜轮廓的测试图样。
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| 关 键 词： | 微透镜列阵 灰阶掩模 激光直写 |
A Novel Method for Refractive Microlens Array Fabrication |
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| Li Xuemin ,Lu Guowei. A Novel Method for Refractive Microlens Array Fabrication[J]. Journal of University of Electronic Science and Technology of China(Social Sciences Edition), 2000, 0(3) |
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| Authors: | Li Xuemin Lu Guowei |
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| Abstract: | In this paper, a novel method for refractive microlens array fabrication is introduced. Its main idea is similar to that of gray-scale mask method. The mask needed is made through laser directwriting technique. Exposed only once, the profile of refractive microlens array is formed on the photoresist. The figures of the test are presented for the microlens array obtained. |
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| Keywords: | microlens array gray-scale mask laser direct-writing |
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