| 钕掺杂氧化锌薄膜的形貌表征与折射率测试 |
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| 引用本文： | 文军,刘丹,张修兴. 钕掺杂氧化锌薄膜的形貌表征与折射率测试[J]. 榆林高等专科学校学报, 2007, 17(6): 35-37 |
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| 作者姓名： | 文军 刘丹 张修兴 |
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| 作者单位： | 渭南师范学院物理系 陕西渭南714000 |
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| 基金项目： | 渭南师范学院校科研和教改项目 |
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| 摘 要： | 通过XRD和AFM分析了Nd掺杂ZnO薄膜的表面形貌,随着Nd掺杂量的增加,ZnO薄膜的结晶度变差,薄膜表面变得粗糙,晶格畸变增大。应用椭圆偏振仪测定了Nd掺杂ZnO薄膜的厚度及折射率,Nd掺杂量对ZnO薄膜的折射率有一定影响。
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| 关 键 词： | ZnO薄膜 钕掺杂 折射率 |
| 文章编号： | 1008-3871（2007）06-0035-03 |
| 修稿时间： | 2007-07-19 |
Study of Nd-doped ZnO Thin Films Surface Structure and Refractive Index |
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| WEN Jun,LIU Dan,ZHANG Xiu-xing. Study of Nd-doped ZnO Thin Films Surface Structure and Refractive Index[J]. Journal of Yulin College, 2007, 17(6): 35-37 |
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| Authors: | WEN Jun LIU Dan ZHANG Xiu-xing |
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| Affiliation: | Department of Physics, Weinan Teachers University, Weinan 714000, Shaanxi |
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| Abstract: | The morphology of Nd-doped ZnO thin films was analysed by XRD and AFM.The results indicate that,with increase of the Nd-doped,the Nd-doped ZnO thin films crystallinity became rough,the crystal lattice distortion increased.With the help the elliptical polarization instrument,we measured the Nd-doped ZnO thin films thickness and the refractive index,the results show that Nd-doped affects the ZnO thin films refractive index. |
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| Keywords: | XRD AFM |
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