| 高精度长光栅动态检测的新方法 |
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| 引用本文： | 高潮,杨世雄,顾庆祥.高精度长光栅动态检测的新方法[J].重庆大学学报(社会科学版),1995,1(3). |
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| 作者姓名： | 高潮 杨世雄 顾庆祥 |
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| 作者单位： | 国家教委光电技术及系统开放实验室重庆大学，国家教委光电技术及系统开放实验室重庆大学，国家教委光电技术及系统开放实验室重庆大学 重庆 630044，重庆 630044，重庆 630044 |
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| 摘 要： | 根据双频激光干涉测量原理,针对进口设备HP5528激光干涉仪不能进行动态检测的缺点。提出了一种改进HP5528激光干涉仪并实现高精度长光栅动态检测的新方法。论述了长光栅长度误差的检测和长光栅莫尔条纹信号质量的检测。其中包括激光信息处理、信号采集、计算机接口和算法。该方法不仅可以检测光栅尺的精度,还可以通过信号分析了解光栅尺制造过程中的误差源对光栅尺制造精度的影响,也可以实现对磁栅、线纹尺等长度计量元件进行高精度动态测量。
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| 关 键 词： | 双频激光 干涉测量 长光栅 |
A New Method for Dynamic Measurement of High-Accuracy Linear Grating |
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| Gao Chao Yang Shixiong Gu Qingxiang.A New Method for Dynamic Measurement of High-Accuracy Linear Grating[J].Journal of Chongqing University(Social Sciences Edition),1995,1(3). |
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| Authors: | Gao Chao Yang Shixiong Gu Qingxiang |
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| Institution: | Gao Chao Yang Shixiong Gu Qingxiang |
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| Abstract: | Based on the principle of double frequency laser interference measurement of high accuracy linear grating. This technique is discussed in detail from two aspects:totol lenth cumulative error measurement and Morie fringe signal quality analysis of linear grating. It includes laser signal processing technique,signal sampling,computer interface circuit and related algorithm. With this method,we can not only get its accuracy parameter of a linear grating,but also analyze the error factors which would affect the accuracy of a linear grating in graving process. In addition, it can carry out dynamic measuremtns for other length metrological elements. |
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| Keywords: | double frequency laser interference measurement linear grating |
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