| 运算电容式传感器用于铝氧化膜厚度测试的研究 |
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| 引用本文： | 张奇生,张仁杰.运算电容式传感器用于铝氧化膜厚度测试的研究[J].上海理工大学学报(社会科学版),1989(4). |
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| 作者姓名： | 张奇生 张仁杰 |
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| 作者单位： | 上海机械学院仪器仪表学院
(张奇生)，上海机械学院仪器仪表学院(张仁杰) |
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| 摘 要： | 本文通过对运算电容式传感器及铝氧化膜厚度测试的实验研究,分析了影响测试精度的主要因素,并给出了校正方法和实用测量模型。
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| 关 键 词： | 电容传感器 电容测量仪器 薄膜 厚度计 |
The Research on Operational Capacitive Transducers for Measuring the Aluminium Oxidic Film |
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| Zhang Qisheng Zhang Renjie.The Research on Operational Capacitive Transducers for Measuring the Aluminium Oxidic Film[J].Journal of University of Shanghai For Science and Technilogy(Social Science),1989(4). |
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| Authors: | Zhang Qisheng Zhang Renjie |
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| Institution: | Zhang Qisheng Zhang Renjie |
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| Abstract: | The present paper Js intended to analyze the operationol capacitive transducer for measuring the thickness of aluminium exidic film. Based on the principle of capacitive transducer measurement, a practical film thickness measuring model is offered. |
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| Keywords: | Capacitve transducer Capacitance measuring instruments Thin films Thickness gouges |
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