开放式等离子体微波反应腔的研究

利用开放式谐振腔理论，结合实际应用的需要，对微波等离子体系统中开放式微波反应腔进行了研究，计算和分析了等离子体密度和等离子体碰撞频率对腔中微波场幅值、相位和反射系数的影响。数值计算结果表明，在一定的等离子体密度下，随着等离子体碰撞频率的提高，等离子体对微波场的吸收增大，此种开放式的结构可有效地在腔中形成有利于微波等离子体产生的驻波场。

Study of Open Microwave Reactive Cavity with Plasmas

According to the need of practical use,a type of open microwave reactive cavity with plasmas,which is often used in the system of microwave excited plasmas,is studied by use of the theory of open cavities.The effect of plasma densities and plasma collision frequencies on the field amplitude,field phase and reflection coefficient of the cavity is computed and analysed.It is clearly shown that the absorption of plasma to microwave is increased with the enhancement of the plasma collision frequency and that the standing wave pattern advantaging production of microwave plasmas can be effectively formed in that type of open structure.